Fabrication of Porous Thin Film Core for Micro-Fluxgate by Using Anodic Aluminum Oxide Templates

Hui Lv1,2,* and Shibin Liu1

1School of Electronics and Information, Northwestern Polytechnical University, Xi'an, P.R. China

2Electrical Engineering and Automation institute, Henan Polytechnic University, Jiaozuo, P.R. China

*Corresponding author: E-mail: lvhui007@hpu.edu.cn

Abstract

Porous thin film core is conducive to impelling the micro-fluxgate toward the direction of low power consumption and high sensitivity. In this experiment, anodic aluminum oxide templates were obtained by two-step anodization process. We could obtain a copper template by two-step replication of the anodic aluminum oxide template. Furthermore, porous Fe-Ni thin film was fabricated by magnetron sputtering on the copper template. The morphology of the porous film complies with the anticipation. The characteristic of the pores can be changed by adjusting the experimental parameters.

Keywords

Nanopore, Thin film core, Two-step replication.

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